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Time:10-09

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Recently in SECS - II, which is about semiconductor equipment communication standard interface, which defines the smart devices and detailed explanation of the message exchange between hosts,
But what is E84, is also a similar to SECS - II agreement?

CodePudding user response:

SEMI E5-0611
SEMI Equipment Communications Standard 2
The Message Content (SECS - II)

SEMI E84-1109
Specification for Enhanced Carrier Handoff
The Parallel I/O Interface

http://www.semi.org/en/sites/semi.org/files/docs/ContentsbyTopic1211.pdf
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